6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd

Product Details
Customization: Available
Application: Diode, Power Electronic Components
Certification: RoHS
Manufacturer/Factory, Trading Company
Gold Member Since 2024

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Registered Capital
1000000 RMB
Plant Area
101~500 square meters
  • 6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd
  • 6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd
  • 6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd
  • 6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd
  • 6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd
  • 6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd
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Overview

Basic Info.

Material
6n Sic Powder
Model
4h
Package
Epi-Ready with Vacuum Packaging
Type
N-Type Semiconductor
Diameter
6 Inch
Thickness
350±25μm
Poly Type
4h
(Afm)Front(Si-Face)Roughness
Ra≤0.2nm
Resistivity
0.016~0.025ohm ·cm
Ltv
≤5μm(10mm*10mm)
Warp
≤35μm
Transport Package
Multi-Waferorsingle Wafer Cassette Packaging
Specification
6Inch
Trademark
HC
Origin
China
HS Code
2849200000
Production Capacity
50000

Product Description

Product Description

 The n-Type Substrates is an essential and important material to support the development of power electronics industry, which can be widely used in high-power high-frequency electronic devices, electric vehicle, photovoltaic inverter, rail transit power control system, etc.
     The company mainly supplies conductive silicon carbide substrates, which are suitable for the manufacture of power devices such as Schottky diodes, MOSFETs, and IGBTs. The sizes mainly include 2 inches, 4 inches, 6 inches,and 8 inches, and non-standard sizes can be customized. 


6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd    Complete Growth-Process-Test6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd
All aspects of inspection6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd


6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd    
                                                                             6 Inch N-type SiC substrate wafer
 
 
No. Items Unit Ultra-P Grade Production Grade Research Grade Dummy Grade
1.Boule Parameters
1.1 Poly type -- 4H
1.2 Surface orientation error ° 4° toward  <11-20>±0.15° 4°  toward  <11-20>±0.5° 4° toward  <11-20>±0.5° 4°  toward  <11-20>±0.5°
2.Electrical Parameters
2.1 dopant cm-³ n-type Nitrogen
2.2 resistivity ohm ·cm 0.016~0.024ohm ·cm 0.015~0.025ohm ·cm 0.015~0.025ohm ·cm NA
3.Mechanical Parameters
3.1 diameter mm 150 ±0.25 mm
3.2 hickness μm 350±25μm
3.3 Primary flat orientation ° [1-100]±5°
3.4 Primary flat length mm 47.5±1.5mm 47.5±2.5mm 47.5±2.5mm 47.5±2.5mm
3.5 LTV μm ≤2μm(10mm*10mm) ≤5μm(10mm*10mm) ≤10μm(10mm*10mm) ≤15μm(10mm*10mm)
3.6 TTV μm ≤5μm ≤10 μm ≤15 μm ≤20 μm
3.7 Bow μm -15 μm~15  μm -25 μm~25   μm -45 μm~45    μm -65   μm~65   μm
3.8 Warp μm ≤20μm ≤35μm ≤50μm ≤70μm
3.9 (AFM)Front(Si-face)Roughness nm Ra≤0.2nm Ra≤0.2nm Ra≤0.2nm Ra≤0.2nm
4.Structure
4.1 micropipe density ea/cm² ≤0.15 ea/cm² ≤0.5 ea/cm² ≤1 ea/cm² ≤2 ea/cm²
4.2 metal content atoms/cm² ≤5E10 atoms/cm² ≤1E11 atoms/cm² ≤1E11 atoms/cm² NA
4.3 TSD ea/cm² ≤100ea/cm² ≤300ea/cm² ≤500ea/cm² NA
4.4 BPD ea/cm² ≤600ea/cm² ≤1000ea/cm² ≤1500ea/cm² NA
5.Front Quality
5.1 front -- Si Si Si Si
5.2 surface finish -- Si-face CMP Si-face CMP Si-face CMP Si-face CMP
5.3 particle ea/wafer ≤60(size≥0.3 μm) ≤100(size≥0.3 μm) NA NA
5.4 scratches ea/mm ≤2,Total Length≤1/2*Diameter ≤5,Total Length≤Diameter NA NA
5.5 chips/indents/cracks/stai -- None None None NA
5.6 Polytype areas -- None ≤0.5%Cumulative area) ≤2%Cumulative area) ≤5%Cumulative area)
5.7 front marking -- None None None None
6.Back Quality
6.1 back finish -- C-face polished
6.2 scratches ea/mm ≤5,Total Length≤Diameter NA NA NA
6.3 Back defects edge -- None None None NA
6.4 Back roughness nm Ra≤0.2nm(5μm*5μm) Ra ≤5nm Ra ≤5nm Ra ≤5nm
7.Edge
7.1 Wafer Edge -- Chamfer Chamfer Chamfer Chamfer
8.Packaging
8.1 Packaging -- Epi-ready with vacuum packaging
8.2 Packaging -- Multi-waferorSingle wafer cassette packaging
SEMI-STDNotes:"NA"means no request.Items not metioned may refer to SEMI-STD.
FAQ

 

Q1: What's the way of shipping ?
A:  We accept DHL, Fedex, TNT, UPS, EMS, SF and etc.
Q2: How to pay?
A:  T/T, PayPal and etc..
Q3: What's the deliver time?
A:  For inventory: the delivery time is 10 workdays.   For customized products: the delivery time is 10to 25 workdays. According to the quantity.
Q4: Can I customize the products based on my need?
 A: Yes, we can customize the specifications according to your needs.
Q5: How to guarantee the quality of your products?
 A: Strict detection during production.Strict sampling inspection on products before shipment and intact product packaging ensured.

6-Inch P-Grade Sic Wafer Sic Substrate MOS&Sbd

 

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