4inch Dummy Grade High Purity Semi-Insulating Silicon Carbide Wafer

• Customization: Available
• Certification: CCC, CE, RoHS
• Ttv: ≤15μm
• Model NO.: 4inch Dummy Grade
• Thickness: 500±25μm
• Specification: 4 Inch D Grade
• Origin: China
• HS Code: 2804611900
• Production Capacity: 50000

Product Description

Product Description
        Semi-insulating silicon carbide substrates are single crystal slices formed by cutting, grinding, polishing, cleaning and other processes of semi-insulating silicon carbide crystals. As an important raw material for the third-generation semiconductors, single crystal substrate slices can be made into silicon carbide-based radio frequency devices through heteroepitaxial growth and device manufacturing. They are important basic materials for the development of the third-generation semiconductor industry. In order to meet customer demand for 4,6-inch products, the company provides domestic and foreign customers with 4,6-inch semi-insulating substrate products with high cost performance in batches.

Downstream products and applications
     High-purity semi-insulated silicon carbide single crystal substrate is mainly used in 5G communication, radar system, seeker, satellite communication, aircraft and other fields, with the advantages of improving the radio frequency range, ultra-long distance recognition, anti-interference, high-speed, large-capacity information transmission and other applications, and is regarded as the most ideal substrate for the production of microwave power devices.

                We are constantly pursuing higher crystal quality and processing quality to better meet customer needs.
Currently, we can supply 4-inch and 6-inch products in batches.
8-inch products are under development.                                         

4 Inch High Purity Semi-insulating SiC Substrate
	Items	Unit	Production Grade	Dummy  Grade
1.Crystal Parameters
1.1	Polytype	--	4H	4H
1.2	Surface orientation on-axis	--	<0001>	<0001>
1.3	Surface orientation off-axis	°	0±0.2°	0±0.2°
1.4	(0004)(FWHM)	arcsec	≤45arcsec	≤100arcsec
2. Electrical Parameters
2.1	Type	--	HPSI	HPSI
2.2	Resistivity	ohm·cm	≥1E10ohm·cm	70% area>1E5ohm·cm
3.Mechanical Parameters
3.1	Diameter	mm	99.5~100mm	99.5~100mm
3.2	Thickness	μm	500±25μm	500±25μm
3.3	Primary flat orientation	°	[1-100]±5°	[1-100]±5°
3.4	Primary flat length	mm	32.5±1.5mm	32.5±1.5mm
3.5	Secondary flat position	°	,90±5° 90°CW from primary flat ±5°, silicon face up	,90±5° 90°CW from primary flat ±5°, silicon face up
3.6	Secondary flat length	mm	18±1.5mm	18±1.5mm
3.7	LTV	μm	≤2μm(5mm*5mm)	NA
3.8	TTV	μm	≤5μm	≤15μm
3.9	Bow	μm	-15μm~15μm	-45μm~45μm
3.10	Warp	μm	≤20μm	≤50μm
3.11	(AFM) Front (Si-face) Roughness	nm	Ra≤0.2nm(5μm*5μm)	Ra≤0.2nm(5μm*5μm)
4.Structure
4.1	Micropipe Density	ea/cm2	≤1ea/cm2	≤10ea/cm2
4.2	Carbon Density	ea/cm2	≤1ea/cm2	NA
4.3	Hexagonal void	--	None	NA
4.4	Metal impurities	atoms/cm2	≤5E12atoms/cm2	NA
5.Front Quality
5.1	Front	--	Si	Si
5.2	Surface Finish	--	SiCMP Si-face CMP	SiCMP Si-face CMP
5.3	Particles	ea/wafer	≤60(size≥0.3μm)	NA
5.4	Scratches	ea/mm	≤2 ,Total Length≤Diameter	NA
5.5	Orange peel/pits/stains/striations/cracks/contamination	mm	None	NA
5.6	Edge chips/indents/fracture/hex plates		None	None
5.7	Polytype areas	--	None	≤30% (Cumulative area)
5.8	Front laser marking	--	None	None
6.Back Quality
6.1	Back Finish	--	CCMP C-face CMP	CCMP C-face CMP
6.2	Scratches	ea/mm	≤5 ,Total Length≤2*Diameter	NA
6.3	Back defects (edge chips/indents)	--	None	None
6.4	Back roughness	nm	Ra≤0.2nm(5μm*5μm)	Ra≤0.2nm(5μm*5μm)
6.5	Back laser marking	--	1mm (from top edge)	1mm (from top edge)
7. Edge
7.1	Edge	--	Chamfer	Chamfer

SEMI-STDNotes:"NA"means no request.Items not metioned may refer to SEMI-STD.

FAQ

 

Q1: What's the way of shipping ?
A:  We accept DHL, Fedex, TNT, UPS, EMS, SF and etc.
Q2: How to pay?
A:  T/T, PayPal and etc..
Q3: What's the deliver time?
A:  For inventory: the delivery time is 10 workdays.   For customized products: the delivery time is 10to 25 workdays. According to the quantity.
Q4: Can I customize the products based on my need?
 A: Yes, we can customize the specifications according to your needs.
Q5: How to guarantee the quality of your products?
 A: Strict detection during production.Strict sampling inspection on products before shipment and intact product packaging ensured.